Product Introduction

It is a key equipment widely used in the semiconductor manufacturing process

Specifications&Materials

6 inches, 8 inches, 10 inches, 12 inches

Usage&Features

It plays a crucial role in process steps such as chemical vapor deposition (CVD) and physical vapor deposition (PVD). This type of heating plate not only directly affects the stability of the process and the quality of the product, but also its technical indicators such as temperature range and heating uniformity are key factors in ensuring the success of the process. Specially used for heating wafers to ensure uniform temperature distribution throughout the entire process, thereby improving process consistency and product quality.